Ј(chng)Lj(bo)ؔ(ci)(jng)W(wng)(zgstyb.cn)аӍ( ӛ |)42123Ї(gu)()MEMS܂a(chn)I(y)l(f)չ(hu)ڰek
Ї(gu)MEMS܂a(chn)I(y)l(f)չ(hu)ИI(y)(ni)OӰI(lng)Įa(chn)I(y)ʢ(hu)2017ڰɹekČáô(hu)“о۽ Ǹ”}(ni)SI(y)ۡ˲C300܂a(chn)I(y)I(y)20ͶYC(j)(gu)(li)Ԓ\l(f)չ
(hu)hg“L(zhng)”MEMSca(chn)I(y)(chung)(lin)˽Ƴek˂c(lin)W(wng)a(chn)I(y)l(f)չՓ“L(zhng)”MEMSca(chn)I(y)f(xi)ͬl(f)չՓ{g(sh)(chung)ca(chn)I(y)(gu)HՓeͶYǢՄ(hu)ͮa(chn)I(y)(xing)Ŀ·a(chn)I(y)朸h(hun)(ji)ͨ(du)Ԓƽ_(ti)f(xi)ͬ(chung)°l(f)չ(jng)(yn)͌(sh)`
ʡcЇ(gu)I(y)F(tun)ӆ(zhn)Ժ܅f(xi)hQЇ(gu)()й(chung)(gu)Ҽ(j)аl(f)ƽ_(ti)O(sh){a(chn)I(y)ͶYka(chn)I(y)l(f)չ(hu)Յf(xi)hpeO(do)P(gun)a(chn)I(y)YԴɹa(chn)I(y)(xing)ĿԼa(chn)I(y)P(gun)͑YԴЇ(gu)()йȼ;боԺO(sh)ʡ(j)c(din)(sh)(yn)ҡa(chn)I(y)(chung)оԺаl(f)C(j)(gu)eO(zhng)ȡ(chung)(gu)Ҽ(j)аl(f)ƽ_(ti);ͻa(chn)I(y)a(chn)I(y)I(lng)M(jn)ȺeO̽(gu)“ƽ_(ti)+(chng)(yng)+K”ȫB(ti)wϵO(sh)ӏ(qing)ڱڑ(yng)ԮȻYԴ{(dio)O(jin)y(c)|(zh)(zi)O(jin)y(c)늾W(wng)ͨ\(yn)ݔˮһwCϹȷĽO(sh)ƏV
(hu)l(f)Ї(gu)()йȑ(zhn)Ҏ(gu)܂a(chn)I(y)ߣȫչʾ˰܂a(chn)I(y)I(lng)ȼg(sh)߶ˮa(chn)Ʒȫ(gu)֮һ(li)и߶ҕ܂a(chn)I(y)l(f)չӿM(jn)Ƽ(chung)¹(jin)wϵO(sh)ȫ(gu)Įa(chn)I(y)Ⱥa(chn)I(y)B(ti)ӿЇ(gu)Hһ(chung)Ї(gu)()йȫЮa(chn)I(y)朹(yng)Ƽ(chung)ͻa(chn)I(y)Ч(yng)@F(xin)챱оԺо(dng)(lin)ơϣſƼпph(hun)ӵһИI(y)I(lng)܊I(y)ɞȫʡΨһȫ(gu)ǰеͬr(sh)м·MEMSAa(chn)ijĿǰ܂a(chn)I(y)P(gun)I(y)_(d)200wO(sh)Ӌ(j)Aby(c)ԇ(yng)ģMȮa(chn)I(y)朗l(g)h(hun)(ji)wϵȫa(chn)I(y)Ч(yng)@F(xin)ɿоwNȫa(chn)ֵǧ|Įa(chn)I(y)Ⱥγɇ(gu)(ni)һ֪Ї(gu)()йȡ
(hu)ͶY137|Ԫ40(g)(xing)ĿM(jn)кs΄(chung)I(y)ͶYһϢg(sh)a(chn)I(y)l(f)չِ܂ǰͶY3֧O(sh)
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